Waferpedia

Comparison ledger

PC 32 P Mversus11600 SRD

Panasonic PC 32 P M, Semitool 11600 SRD, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
PC 32 P MPanasonic
11600 SRDSemitool
OEMPanasonicSemitool
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyPanasonic PC 32 P MSemitool 11600 SRD
Specifications
ManufacturerPanasonic[1]Semitool[2]
ModelPC 32 P M[1]11600 SRD[2]
TypePlasma Cleaner[1]—
Configuration—Ceramic[2]
Equipment type—Spin Rinse Dryer[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]inventory listing