Comparison ledger
Nordson March AP 600, YES 1000P, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | March AP 600Nordson | 1000PYES |
|---|---|---|
| OEM | Nordson | YES |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Acquisition |
| Control system | — | — |
| Generation | — | — |
| Family | Nordson March AP 600 | YES 1000P |
| Specifications | ||
| Manufacturer | Nordson[1] | — |
| Model | AP 600[2] | 1000P[4] |
| Type | Plasma Cleaner[2] | — |
| Category | Wet Processing / Clean[1] | — |
| Enclosure dimensions (W x D x H) | 569 x 869 x 704 mm (22 x 34 x 28 in.)[3] | — |
| Net weight | 221 kg (487 lbs)[3] | — |
| Chamber maximum volume | 50.4 liters (3076 in³)[3] | — |
| Number of electrode positions | 7[3] | — |
| RF power standard wattage | 600 W[3] | — |
| Frequency | 13.56 MHz[3] | — |
| Control system | EPC control with touchscreen interface[3] | PLC driven with plain English real time process readout and diagnostics in the event of system abort[4] |
| Remote interface | PlasmaLINK, ProcessLINK[3] | — |
| System type | — | Plasma cleaning system[4] |
| Shelf configuration | — | Four 16 x 16 inch shelves[4] |
| Total capacity | — | 1024 square inches[4] |
| Number of shelves | — | 4[4] |
| Shelf size | — | 16 x 16 inches[4] |
| Power | — | 1000 W[5] |
| Configuration | — | Parallel plate[5] |
| Operation modes | — | Active, RIE, Downstream[4] |
| Sample size range | — | From smallest semiconductor chip to large flat panels[4] |
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