Waferpedia

Comparison ledger

AST 2800 RTPversus0332 F 9453 302 Diffusion

Mattson AST 2800 RTP, Varian 0332 F 9453 302 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMMattsonVarian
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyMattson AST 2800Varian 0332 F 9453 302 Diffusion
Specifications
ConfigurationRefurbished[1]—
ManufacturerMattson[1]—
ModelAST 2800[1]—
Equipment typeRapid Thermal Process (RTP) system[1]—
CategoryThermal / Diffusion[2]—
Asset Number—142841[3]
Last Confirm Date—October 14, 2025[4]

Plan your fab

Building a Thermal / Diffusion process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]fab-spares.comfab-spares.com