Comparison ledger
Lapmaster 15 Lapper, Strasbaugh 6 EC CMP Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 15 LapperLapmaster | 6 EC CMP WaferStrasbaugh |
|---|---|---|
| OEM | Lapmaster | Strasbaugh |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Lapmaster 15 | Strasbaugh 6 EC CMP Wafer |
| Specifications | ||
| Number Of Conditioning Rings | Up to 3[1] | — |
| Ring ID | Up to 5.5″[1] | — |
| Plate Diameter – Outside | 15″[1] | — |
| Plate Diameter – Inside | 3 1/2″[1] | — |
| Standard RPM | 60[1] | — |
| Drive Motor | 1/2 HP[1] | — |
| Electrics | 110V / 1Ph / 60Hz[1] | — |
| Dimensions – Approximate | 26″(L-R) x 21″(F-B) x 22″(H)[1] | — |
| Configuration | Equipped with:[1] | — |
| Equipped with: 15″ Cast Iron Plate | Included[1] | — |
| Equipped with: (3) Yoke/Roller Bearing Assemblies | Included[1] | — |
| Equipped with: (3) Conditioning Rings | Included[1] | — |
| Equipped with: (3) Hold Downs | Included[1] | — |
| Equipped with: 30 Minute Timer | Included[1] | — |
| Make | — | Strasbaugh[2] |
| Model | — | 6 EC CMP[2] |
| System type | — | CMP Wafer Polisher[2] |
| System description | — | Economical tool for CMP research, failure analysis, and low-volume production[3] |
| Operation | — | Semi-automatic[3] |
| GUI | — | Color, touch-screen GUI[3] |
| Table and spindle motors | — | Closed-loop table and spindle RPM motors[3] |
| Pad conditioning | — | Programmable pad conditioning[3] |
| Programmable control zones | — | 20 zones[3] |
| Programmable control parameters | — | Dwell time, down force, and RPM[3] |
| Pad conditioning media | — | Diamond plated disk or nylon brush[3] |
| Option | — | ViPRR carriers[3] |
| Asset # | — | 73620[2] |
| Operating mode | — | semi-automatic[3] |
| User interface | — | color, touch-screen GUI[3] |
| Process control zones | — | 20 zones of programmable control[3] |
| Facility utility requirements | — | DI Water: 30 psi minimum, 1.5 GPM flow rate; Vacuum: 25" HG; Air: 100 psi, 5 SCFM; Electrical: 208 or 230 VAC, 3 phase, 60 Hz, 20 AMPS with conditioner, 30 AMPS; Exhaust: approx. 100 CFM[3] |
| Pad conditioning tools | — | diamond plated disk or nylon brush[3] |
| Options | — | ViPRR carriers[3] |