Waferpedia

Comparison ledger

120 Continuousversus6 DE DC 6

Lapmaster 120 Continuous, Strasbaugh 6 DE DC 6, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
6 DE DC 6Strasbaugh
OEMLapmasterStrasbaugh
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLapmaster 120 ContinuousStrasbaugh 6 DE DC 6
Cited variants—
Specifications
Configuration—Six Spindle[1]
Make—Strasbaugh[2]
Model—6 DE DC 6[3]
Type—Polisher[2]
Number of spindles—6[1]
Capacity—12 inch[1]

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Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]Equipment inventory listing
  3. [3]Equipment inventory listing