Waferpedia

Comparison ledger

IPEC 472versusIPEC 472 01001 Automatic Wafer

Lam Research IPEC 472, Lam Research IPEC 472 01001 Automatic Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
IPEC 472Lam Research
IPEC 472 01001 Automatic WaferLam Research
OEMLam ResearchLam Research
CategoryCMPCMP
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyLam Research IPEC 472Lam Research IPEC 472
Specifications
ConfigurationSurface Automated[1]50 Amp[4]
Wafer size6 inch, 8 inch[2]—
CategoryCMP (Chemical Mechanical Polisher / Chemical Mechanical Planarization)[1]—
Make / OEMLam / IPEC[1]—
Model472[1]—
Voltage—208 VAC[4]
Phase—3 Phase[4]
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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]Equipment inventory listing
  4. [4]inventory listing