Waferpedia

Comparison ledger

.498 PSL WaferversusS2-ET

KLA .498 PSL Wafer, Olympus S2-ET, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
S2-ETOlympus
OEMKLAOlympus
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferOlympus S2-ET
Specifications
ConfigurationNIST Traceable[1]—
NIST traceabilityYes[1]—
Manufacturer—Olympus[2]
Model—S2-ET[2]
Listed category—Optical Microscopes[2]
Described as—light microscope[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]emsal.nanofab.utah.eduemsal.nanofab.utah.edu