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.498 PSL WaferversusP 16 Surface

KLA .498 PSL Wafer, KLA P 16 Surface, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
.498 PSL WaferKLA
P 16 SurfaceKLA
OEMKLAKLA
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .498 PSL WaferKLA P
Specifications
ConfigurationNIST Traceable[1]Windows XP[2]
NIST traceabilityYes[1]—
Phase—1 Phase[3]
Operating System—Windows XP[4]
Extended range—1 mm[4]
3D option—Yes[4]
Instrument type—Mechanical profilometer[4]
Vertical resolution—0.6 Å[5]
Lateral resolution—0.5 µm[5]
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Sources (5)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]waferpedia.comwaferpedia.com