Waferpedia

Comparison ledger

.204 PSL WaferversusDSM 200 Overlay Measurement

KLA .204 PSL Wafer, SUSS MicroTec DSM 200 Overlay Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.

LinkedIn X Email
Side-by-side comparison of selected equipment models
Attribute
.204 PSL WaferKLA
DSM 200 Overlay MeasurementSUSS MicroTec
OEMKLASUSS MicroTec
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA .204 PSL WaferSUSS MicroTec DSM 200 Overlay Measurement
Specifications
ConfigurationNIST Traceable[1]Double-Sided[3]
Wafer Size8 inch[1]—
TraceabilityNIST[2]—
Compatible ToolsSurfscan 6xy0, Sp1[1]—
NIST TraceableYes[1]—
.204 PSL Wafer entryDSM 200 Overlay Measurement entryAsk about these tools →Share experience with this comparison →

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (3)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing