Comparison ledger
KLA 1007, Tokyo Electron Precio Automatic Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1007KLA | Precio Automatic WaferTokyo Electron |
|---|---|---|
| OEM | KLA | Tokyo Electron |
| Category | Test & Probe | Test & Probe |
| Wafer size | — | Single Foup Wafer Loader (Right) |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 1007 | Tokyo Electron Precio |
| Specifications | ||
| Manufacturer | KLA[1] | — |
| Model | 1007[1] | Precio[3] |
| Description | Wafer Prober[1] | — |
| Wafer size | 150 mm[1] | Single Foup Wafer Loader (Right)[6] |
| Convertible to 8 inch wafer size | Yes[1] | — |
| Vintage | 01.06.1995[1] | 2015[3] |
| Make | KLA[2] | Tel[3] |
| Equipment type | Prober[2] | — |
| Configuration | — | 50/60 Hz[3] |
| Rated Power Input | — | 200 V[3] |
| Rated Breaker Input | — | 30 A[3] |
| Phase | — | 1 Phase[5] |
| Power | — | 2.9 kVA[5] |
| Wafer Size | — | 12 inch[3] |
| Frequency | — | 50/60 Hz[3] |
| Power Input | — | 200 V[3] |
| Breaker Rating | — | 30 A[3] |
| kVA Rating | — | 2.9 kVA[5] |
| Loader Type | — | Single Foup Loader (Right)[3] |
| Interface Options | — | GPIB Tester Interface Options, Top Plate Unit, V93K PIB & Pogo Docking Type[3] |
| Vintage Year | — | 2015[3] |
| Power rating | — | 2.9 kVA[5] |
| Wafer loader | — | Single Foup Loader (Right)[3] |
| Tester interface | — | GPIB[3] |
| Available options | — | Top Plate Unit, V93K PIB & Pogo Docking Type[3] |
Plan your fab
Building a Test & Probe process? Get a complete equipment list.
Open the fab equipment planner →