Waferpedia

Comparison ledger

1007versusTH-760

KLA 1007, Signatone TH-760, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
TH-760Signatone
OEMKLASignatone
CategoryTest & ProbeTest & Probe
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007Signatone TH-760
Specifications
ManufacturerKLA[1]—
Model1007[1]—
DescriptionWafer Prober[1]—
Wafer size150 mm[1]—
Convertible to 8 inch wafer sizeYes[1]—
Vintage01.06.1995[1]—
MakeKLA[2]—
Equipment typeProber[2]—
Machine type—test head probe station[3]
Base structure—constructed around a vibration isolation table[3]
Probe station arrangement—the test head is docked beneath a large plate that floats on a cushion of compressed N2 or C.D.A.[3]
Access feature—a hole is milled into the plate to provide for probing into the device[3]
Support platen—a micropositioner support platen is mounted on top of the plate[3]
Mobility—the system has wheels so that it can be positioned above the test head[3]
Options—CAP (Computer Aided Probing), lasers, manual or motorized micropositioners, active probes[3]
Designed for—probing devices mounted directly in a test head[4]
Probe access—a hole is milled into the plate to provide access for probing into the device[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]fabsurplus.comfabsurplus.com
  2. [2]Equipment inventory listing
  3. [3]web.archive.orgweb.archive.org
  4. [4]waferpedia.comwaferpedia.com
  5. [5]waferpedia.comwaferpedia.com