Waferpedia

Comparison ledger

1007versusTS 3500 Automatic Wafer

KLA 1007, MPI TS 3500 Automatic Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1007KLA
OEMKLAMPI
CategoryTest & ProbeTest & Probe
Wafer size—Wafer ID Reader
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyKLA 1007MPI TS 3500 Automatic Wafer
Cited variants—
  • TS3500-IFE[1]
  • TS3500-SE[1]
  • TS3500-SE with WaferWallet[1]
  • TS3500-SE with WaferWallet MAX[1]
Specifications
ManufacturerKLA[2]MPI[4]
Model1007[2]—
DescriptionWafer Prober[2]—
Wafer size150 mm[2]Wafer ID Reader[4]
Convertible to 8 inch wafer sizeYes[2]—
Vintage01.06.1995[2]—
MakeKLA[3]—
Equipment typeProber[3]—
Software—Sentio[4]
AST—RC-300 T-SA[5]
TS 3500 Series replaces PN—RC 300 T[5]
Category—Test & Probe[4]
Automation—300 mm fully automated probe station[1]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]mpi-corporation.commpi-corporation.com
  2. [2]fabsurplus.comfabsurplus.com
  3. [3]Equipment inventory listing
  4. [4]waferpedia.comwaferpedia.com
  5. [5]inventory listing