Comparison ledger
KLA 0035235-003 MMD Head, KLA 2138, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 2138KLA | |
|---|---|---|
| OEM | KLA | KLA |
| Category | Metrology & Inspection | Metrology & Inspection |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | KLA 0035235-003 MMD Head | KLA 2138 |
| Specifications | ||
| Configuration | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Model | 0035235-003[1] | — |
| Make | KLA[1] | — |
| Part Description | TSTD PCB ASSY, MMD MEAS HEAD[1] | — |
| Compatible System | KLA AIT-XP[1] | — |
| Product name | — | KLA-2138[2] |
| Type | — | Wafer Inspection System[2] |
| Technology | — | Ultra-Broadband Technology[2] |
| Illumination source | — | Ultra-broadband (UBB) illumination source[2] |
| Optics | — | Significantly improved brightfield optics[2] |
| Detection technology | — | Segmented Auto Threshold (SAT) technology[2] |
| Optional configuration | — | Integrated SMIF minienvironment[2] |
| Optics type | — | Brightfield optics, significantly improved[2] |
| Integration | — | Available with integrated SMIF minienvironment[2] |
| Inspection type | — | Inline wafer inspection[2] |
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