Comparison ledger
Hitachi 1305 BSG 3, Veeco M 3306 Wet Processing Platform, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | |
|---|---|---|
| OEM | Hitachi | Veeco |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Veeco M 3306 Wet Processing Platform |
| Specifications | ||
| Equipment type | — | Wet Processing Platform[1] |
| Manufacturer (OEM) | — | Veeco[1] |
| Model | — | M 3306[1] |
| Unit vintage | — | 2019[1] |
| Asset number | — | 129771[1] |
Plan your fab
Building a Wet Processing / Clean process? Get a complete equipment list.
Open the fab equipment planner →