Comparison ledger
Hitachi 1305 BSG 3, Tokyo Electron NS 300 Z Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | NS 300 Z WaferTokyo Electron |
|---|---|---|
| OEM | Hitachi | Tokyo Electron |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Tokyo Electron NS 300 |
| Specifications | ||
| Software Version | — | 6.00.26.2[1] |
| System Power Rating | — | 208 AC, 3 Phase[1] |
| Configuration | — | 4 Load Port[2] |
| OEM | — | Tokyo Electron[1] |
| Model | — | NS 300 Z Wafer[1] |
| Equipment type | — | Wafer scrubber[1] |
| Category | — | Wet Processing / Clean[1] |
| Wafer size | — | 12 inch[1] |
| Load ports | — | 4[2] |
| HDD | — | Not included[2] |
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