Waferpedia

Comparison ledger

1305 BSG 3versusDelta 36 TA Wafer Mask

Hitachi 1305 BSG 3, SUSS MicroTec Delta 36 TA Wafer Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1305 BSG 3Hitachi
OEMHitachiSUSS MicroTec
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyHitachi 1305 BSG 3SUSS MicroTec Delta 36 TA Wafer Mask
Specifications
Manufacturer—SUSS MicroTec[1]
Model—Delta 36 TA Wafer Mask[2]
Equipment type—Wafer Mask Cleaner[2]
Category—Wet Processing / Clean[1]

Plan your fab

Building a Wet Processing / Clean process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing