Comparison ledger
Hitachi 1305 BSG 3, Lam Research SEZ SP 203, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 1305 BSG 3Hitachi | SEZ SP 203Lam Research |
|---|---|---|
| OEM | Hitachi | Lam Research |
| Category | Wet Processing / Clean | Wet Processing / Clean |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | 1998 Vintage |
| Control system | — | — |
| Generation | — | — |
| Family | Hitachi 1305 BSG 3 | Lam Research SEZ SP 203 |
| Cited variants | — |
|
| Specifications | ||
| Configuration | — | 200-208 V[2] |
| Phase | — | 3 Phase[2] |
| Pinless chuck | — | 6 Inch[2] |
| Software | — | Major Version 117[2] |
| Cabinet 1 | — | Main tank and Buffer tank[2] |
| Cabinet 2 | — | Main tank and Buffer tank[2] |
| Cabinet 3 | — | Main tank[2] |
| Modifications | — | FFU controller; 1 cabinet drain box repaired[2] |
| Manufacturer | — | Lam Research[3] |
| Category | — | Wet Processing / Clean[3] |
| Wafer size | — | 6 inch[2] |
| Power | — | 200-208 V[2] |
| Frequency | — | 50/60 Hz[2] |
| Wafer handling | — | 6 Inch Bernoulli Handling[2] |
| Chuck | — | Pinless chuck: 6 Inch[2] |
| Vacuum exhaust | — | Exhaust Up[3] |
| Chemistry cabinets | — | 3 Chemistry Cabinets[3] |
| Software major version | — | 117[2] |
| Software minor version | — | 2015.08.21[2] |
| GEM version | — | GEM 5.8[2] |
| Known problems | — | Keyboard switching; Voltage fluctuations[2] |
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