Comparison ledger
Disco DFS 8960 Surface Planarization, Lapmaster 15 Lapper, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 15 LapperLapmaster | |
|---|---|---|
| OEM | Disco | Lapmaster |
| Category | CMP | CMP |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2014 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Disco DFS 8960 Surface Planarization | Lapmaster 15 |
| Specifications | ||
| Configuration | Fully Automatic[1] | Equipped with:[3] |
| Phase | 3 Phase[1] | — |
| Model | DFS 8960 Surface Planarization[2] | — |
| Manufacturer | Disco[2] | — |
| Category | CMP[1] | — |
| Wafer sizes | 8-inch, 12-inch[2] | — |
| Type | Fully automatic surface planarization system[1] | — |
| Power | 200-230 V[1] | — |
| Frequency | 50/60 Hz[1] | — |
| Vacuum / pumping | Two duct units for exhausting the process chambers[1] | — |
| Included items | Sedimentation Tank (collection container); Disco DTU 1531 Chiller unit[2] | — |
| Vintage | 2014[2] | — |
| Number Of Conditioning Rings | — | Up to 3[3] |
| Ring ID | — | Up to 5.5″[3] |
| Plate Diameter – Outside | — | 15″[3] |
| Plate Diameter – Inside | — | 3 1/2″[3] |
| Standard RPM | — | 60[3] |
| Drive Motor | — | 1/2 HP[3] |
| Electrics | — | 110V / 1Ph / 60Hz[3] |
| Dimensions – Approximate | — | 26″(L-R) x 21″(F-B) x 22″(H)[3] |
| Equipped with: 15″ Cast Iron Plate | — | Included[3] |
| Equipped with: (3) Yoke/Roller Bearing Assemblies | — | Included[3] |
| Equipped with: (3) Conditioning Rings | — | Included[3] |
| Equipped with: (3) Hold Downs | — | Included[3] |
| Equipped with: 30 Minute Timer | — | Included[3] |