Comparison ledger
Denton Vacuum Integrity-20, Denton Vacuum Integrity-36, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | Integrity-20Denton Vacuum | Integrity-36Denton Vacuum |
|---|---|---|
| OEM | Denton Vacuum | Denton Vacuum |
| Category | Ophthalmic coating system | Ophthalmic coating system |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | Windows based | Windows NT |
| Generation | — | — |
| Family | Denton Vacuum Integrity-20 | Denton Vacuum Integrity-36 |
| Cited variants |
| — |
| Specifications | ||
| Model | Integrity-20[1] | — |
| System type | Ophthalmic AR coating system[1] | — |
| Positioning | Compact, economical, easy to operate[1] | — |
| Automation | Touch and Coat Automation[1] | — |
| Control software | Windows-based operating software[1] | — |
| Deposition method | Ion-Assisted Deposition[1] | — |
| Process | Glareban AR coating process[1] | — |
| Fixturing | Fast-Flip fixturing[1] | — |
| Coating chamber size | 20" x 24" x 28"[1] | — |
| Deposition source capacity | 16 lenses (70 mm uncut lens)[1] | — |
| Cycle time | 48 min./Both sides[1] | — |
| System size | 48" x 77" x 30"[1] | — |
| Vacuum chamber material | — | 304 stainless steel[2] |
| Vacuum chamber dimensions | — | 36" wide x 36" deep x 42" high[2] |
| Vacuum chamber door | — | Full-width front door with two-point articulating hinges and Viton O-ring seal[2] |
| Pumping system | — | APD Cryogenics Marathon 12 cryogenic pump, APD Displex water-cooled compressor, Edwards E2M175 two-stage rotary vane mechanical pump, and Polycold PFC330ST cryogenic cooler[2] |
| Vacuum gauging | — | Two Leybold Inficon ITR100 wide-range Bayard-Alpert ionization gauge tubes and two Leybold Inficon TTR211S Pirani transmitters[2] |
| Process gas control | — | MKS 2179 mass flow controller, 0-100 SCCM in fixed flow mode[2] |
| Substrate rotation | — | Standard direct drive single rotation system with 1.0" diameter shaft[2] |
| Substrate heaters | — | Two 3 kW radiant quartz heater assemblies[2] |
| Ion source | — | DVI CC-105 cold cathode ion source with Senvac GD20/600 and Sorensen DCS 33-33 power supplies[2] |
| Electron beam source | — | TFI-Telemark TFI-261-06 six-pocket rotary crucible source with ST-4 4.0 kW power supply[2] |
| Low voltage resistance source | — | Denton Vacuum 4.0 kW two-position A/B low voltage resistance evaporation power supply[2] |
| Deposition controller | — | Inficon XTC/2 quartz crystal controller with single crystal sensor[2] |
| Control system | — | Gateway computer with 17" SVGA monitor, IEEE-488 and RS-232 interfaces, and GE Fanuc 9030 PLC via RS-485 using GE Cimplicity HMI software[2] |
| Control modes | — | Automatic, Manual, and Service[2] |
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