Waferpedia

Comparison ledger

1000 Hot PlateversusSoltec XPM 3 i 820

CEE 1000 Hot Plate, Vitronics Soltec XPM 3 i 820, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMCEEVitronics
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateVitronics Soltec XPM
Specifications
Configuration4"[1]—
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Power—58 kWA[2]
Cycles—50/60 Hz[2]
Full Load—70 A[2]
Largest load—12 A[2]
Voltage—3X480 V[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing