Waferpedia

Comparison ledger

1000 Hot Plateversus482 Oven Control

CEE 1000 Hot Plate, Spectra-Physics 482 Oven Control, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
482 Oven ControlSpectra-Physics
OEMCEESpectra-Physics
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyCEE 1000 Hot PlateSpectra-Physics 482 Oven Control
Specifications
Configuration4"[1]With Model 2200 Ion Laser Purge Air Pump[2]
TypeHot Plate[1]—
Wafer Size4 inch[1]—
Category—Thermal / Diffusion[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com