Comparison ledger
Canon FPA 3000 i 4 i-Line, SUSS MicroTec 150 e Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | FPA 3000 i 4 i-LineCanon | 150 e MaskSUSS MicroTec |
|---|---|---|
| OEM | Canon | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Canon FPA 3000 | SUSS MicroTec 150 e Mask |
| Specifications | ||
| Reticle size | 6"[1] | — |
| Wafer type | Notch[1] | — |
| Auto feed | Left hand[1] | — |
| Chuck type | Pin[1] | — |
| GBR unit | No[1] | — |
| Cassette barcode | No[1] | — |
| Reticle barcode | No[1] | — |
| Track interface/type | Yes, DNS[1] | — |
| Software version | V4.08B.09[1] | — |
| Configuration | Missing parts:[1] | — |
| Date of lens data | 4/3/2020[1] | — |
| IUC Uniformity NA/Sigma mode (54/60) | 9087[1] | — |
| IUC Distribution NA/Sigma mode (54/60) | 1.753[1] | — |
| Wafer Size | 8 inch[2] | — |
| Reticle Size | 6 inch[1] | — |
| Track Interface | Yes, DNS[1] | — |
| Missing Parts | PCBs from D-Rack, Main computer[1] | — |
| Lens Data Date | 4/3/2020[1] | — |
| Vintage | 1994[2] | — |
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