Comparison ledger
Brooks 017-0146-01 Prealigner, SUSS MicroTec MA 200 Mask, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | MA 200 MaskSUSS MicroTec |
|---|---|---|
| OEM | Brooks | SUSS MicroTec |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | SUSS MicroTec MA 200 |
| Specifications | ||
| Configuration | — | With CIC1000 lamp housing[1] |
| Hardware | — | Intel Standard[1] |
| Operation | — | Semi-automatic[1] |
| Wafer sizes | — | 6 inch, 8 inch[1] |
| Optics | — | UV400/cont/W-200[1] |
| Sensor | — | 365/405 dual range[1] |
| Lamp housing | — | CIC1000[1] |
| Computer hardware | — | Intel Standard[1] |
| Alignment system | — | SUSS AL3000 Auto Align[1] |
| Microscope | — | DVM8 with Sony cameras, L25X Objective (qty 2)[1] |
| Mask holder | — | with Guard[1] |
| Field Expanders | — | Yes[1] |
| Wafer sizes (from other listing) | — | 6, 8 inch[2] |
| OEM | — | SUSS[1] |
| Model | — | MA 200[1] |
| Equipment type | — | Mask Aligner[1] |
| Wafer size | — | 8 inch[1] |
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