Comparison ledger
Brooks 017-0146-01 Prealigner, KLA RS 75 Sheet Resistance Measurement, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 017-0146-01 PrealignerBrooks | |
|---|---|---|
| OEM | Brooks | KLA |
| Category | Lithography | Lithography |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Brooks 017-0146-01 Prealigner | KLA RS 75 |
| Specifications | ||
| Configuration | — | 115 Volts[1] |
| Measurement Range | — | 5 mΩ/sq - 5 MΩ/sq[2] |
| Repeatability (VLSI) | — | < 0.2% (1σ)[2] |
| Accuracy (VLSI) | — | ±1%[2] |
| Edge Exclusion | — | 3 mm from edge of film[2] |
| Throughput (5-site) | — | 100 WPH[2] |
| Alignment System | — | Notch/Flat aligner on Probe Arm[2] |
| Computer OS | — | DOS Software: Rev 6.22[2] |
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