Waferpedia

Comparison ledger

101-149-053 Gold BoosterversusEV 501 Wafer

Branson 101-149-053 Gold Booster, EV Group EV 501 Wafer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
EV 501 WaferEV Group
OEMBransonEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size—Capable of thermo compression, fusion or anodic wafer bonding
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBranson 101-149-053 Gold BoosterEV Group EV 501 Wafer
Cited variants—
  • EV 501 Wafer Bonder[1]
Specifications
Configuration1:1.5[2]Refurbished[5]
ManufacturerBranson[3]—
Model101-149-053[3]—
TypeGold Booster[3]—
Operating frequency20 kHz[4]—
Gain1:1.5[3]—
Mounting thread1/2-20[4]—
Length5.4 in[4]—
Gain ratio1:1.5[3]—
Wafer size—Capable of thermo compression, fusion or anodic wafer bonding[5]
Thickness—Max wafer stack thickness 6 mm[5]
Bottom side heater—550°C max. in 1°C steps[5]
Temperature uniformity—± 1,5 %[5]
Bonding capability—Capable of thermo compression, fusion or anodic wafer bonding[5]
Bond chamber—Bond chamber for small pieces up to 150 mm wafers (with correct tooling)[5]
Vacuum pump—Turbo Pump[5]
Power supply—High voltage power supply for anodic bonding (additional tooling may be required)[5]
Electronics—Electronics Rack[5]
Control/software—Computer & Software[5]
Display—LCD Monitor[5]
Pump—Roughing Pump[5]
Manual—Operations Manual[5]
Condition—Refurbished[5]
Wafer sizes supported—2, 3, 4, 5, 6, 12 inch[5]
Max wafer stack thickness—6 mm[5]
Bottom side heater max temperature—550°C max.[5]
Heater temperature step—1°C steps[5]
Roughing pump—Roughing Pump[5]
High voltage power supply—High voltage power supply for anodic bonding (additional tooling may be required)[5]
Electronics rack—Electronics Rack[5]
Computer & software—Computer & Software[5]

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Sources (5)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]inventory listing
  3. [3]waferpedia.comwaferpedia.com
  4. [4]nextdayautomation.comnextdayautomation.com
  5. [5]inventory listing