Waferpedia

Comparison ledger

0 V 500versusSC12.5R

Blue M 0 V 500, Mellen SC12.5R, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0 V 500Blue M
SC12.5RMellen
OEMBlue MMellen
CategoryThermal / DiffusionThermal / Diffusion
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyBlue M 0 V 500Mellen SC12.5R
Specifications
Equipment type—Three zone tube furnace[1]
Operation—Each capable of independent operation[1]
Quantity listed—2[1]
Heating zones—3 zones[2]
Zone length—3 × 8 in[2]
Total length—24 in[2]
Maximum temperature per zone—1200 °C[2]
Control system—MELLEN ADAPT control system[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]cnsi.ucsb.educnsi.ucsb.edu
  2. [2]cnsi.ucsb.educnsi.ucsb.edu