Comparison ledger
Blue M 0 500, Thermco 5200 Diffusion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0 500Blue M | 5200 DiffusionThermco |
|---|---|---|
| OEM | Blue M | Thermco |
| Category | Thermal / Diffusion | Thermal / Diffusion |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Blue M 0 500 | Thermco 5200 Diffusion |
| Specifications | ||
| Manufacturer | Blue M[1] | — |
| Model | 0 500[1] | 5200[3] |
| Asset number | 139866[1] | — |
| Last confirm date | September 10, 2025[1] | — |
| Equipment type | Oven[1] | — |
| Configuration | — | Boron[2] |
| Make | — | Thermco[3] |
| Wafer size | — | 6 inch[3] |
| Process chambers | — | Two to four-process chamber systems[4] |
| Substrate diameter | — | Up to 150 mm[4] |
| Applications | — | Semiconductor, PV, LED, Nano, and MEMS substrates[4] |
| Control system | — | Thermco TMX controller[4] |
| Heating zones | — | 3 independently controlled heating zones[4] |
| Operating temperature range | — | 200°C to 1350°C[4] |
| Flatzone | — | 1,100 mm[4] |
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