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Optima HDversus160 XP Ion

Axcelis Optima HD, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

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Side-by-side comparison of selected equipment models
Attribute
Optima HDAxcelis
160 XP IonVarian
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyAxcelis Optima HDVarian 160 XP Ion
Specifications
Phase3 Phase[1]—
Configuration50/60 Hz[1]150mm High Current IMP[2]
Voltage208 Vac[1]—
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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com