Comparison ledger
Axcelis 200 ACU, Lam Research 2300 e 5 Kiyo, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 200 ACUAxcelis | 2300 e 5 KiyoLam Research |
|---|---|---|
| OEM | Axcelis | Lam Research |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis NV GSD 200 | Lam Research 2300 |
| Specifications | ||
| Configuration | Parts Machine[1] | 3 Chamber + 1 Strip[5] |
| Manufacturer | Axcelis[1] | — |
| Model | 200 ACU[1] | — |
| Tool type | Asher[1] | — |
| Wafer size | 200mm[3] | — |
| Serial number | AU6A356AH[3] | — |
| Computer system | M 200 PC, M 200[4] | — |
| Part number | SC 4572 A[4] | — |
| Volts | 208[4] | — |
| Amps | 30[4] | — |
| Equipment type | Asher[1] | — |
| Wafer configuration | 8 inch[2] | — |
| Loadport | — | TDK TAS300[5] |
| ATM Robot | — | Kawasaki P/N 3NT510B-A002[5] |
| TM Robot | — | Brooks 201600-294-0002[5] |
| MKS E28D-29237 Process Vacuum Gauge | — | 0.1 Torr[5] |
| MKS 625D-30518 Chamber Vacuum Gauge | — | 1 Torr[5] |
| Number of Chambers | — | 3 Chamber + 1 Strip[5] |
| Turbo Pump | — | Edwards STP-XA3203CV[5] |
| Turbo Pump Controller | — | Edwards SCU-1600[5] |
| Bias RF Generator | — | Lam 3156110-214[5] |
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