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Comparison ledger

17099370 Outer strike plateversusEHPI 500 Medium Current

Axcelis 17099370 Outer strike plate, Varian EHPI 500 Medium Current, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMAxcelisVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones—2001 Vintage
Control system——
Generation——
FamilyAxcelis 17099370 Outer strike plateVarian EHPI 500
Specifications
ConfigurationUsed with Axcelis GSD 200[1]5 Wire[3]
ManufacturerAxcelis[2]—
Model17099370 Outer strike plate[1]EHPI 500[3]
Part numberOEM number 17099370[2]—
Used withAxcelis GSD 200[1]—
ConditionNEW[2]—
Phase—3 Phase[3]
OEM—Varian[3]
Tool type—Medium current implanter[4]
Application—Ion implantation[4]
Wafer size—8 inch[3]
Power—3 Phase[3]
Electrical configuration—5 Wire[3]
Line frequency—50/60 Hz[3]

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Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]inventory listing
  4. [4]waferpedia.comwaferpedia.com