Comparison ledger
Axcelis 17099370 Outer strike plate, Varian EHP 500 Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 17099370 Outer strike plateAxcelis | EHP 500 IonVarian |
|---|---|---|
| OEM | Axcelis | Varian |
| Category | Ion Implantation | Ion Implantation |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Axcelis 17099370 Outer strike plate | Varian EHP 500 Ion |
| Specifications | ||
| Configuration | Used with Axcelis GSD 200[1] | SMIF[3] |
| Manufacturer | Axcelis[2] | — |
| Model | 17099370 Outer strike plate[1] | — |
| Part number | OEM number 17099370[2] | — |
| Used with | Axcelis GSD 200[1] | — |
| Condition | NEW[2] | — |
| Software version | — | 13.42.18[3] |
| CIM | — | GEM and SECS[3] |
| Handler | — | End station PP+ with both Load Lock[3] |
| Wafer size | — | 8 inch[3] |
| Handler / End station | — | End station PP+ with both Load Lock[3] |
| SMIF | — | Included[3] |
| Scrubber Exhaust | — | Included[3] |
| 2 Stage Rough Pump | — | Included[3] |
| Load Lock Rough Pump | — | Included[3] |
| Vintage year | — | 1998[3] |
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