Waferpedia

Comparison ledger

Oasisversus1305 BSG 3

Applied Materials Oasis, Hitachi 1305 BSG 3, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OasisApplied Materials
1305 BSG 3Hitachi
OEMApplied MaterialsHitachi
CategoryWet Processing / CleanWet Processing / Clean
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials OasisHitachi 1305 BSG 3
Specifications
Wafer size12 inch (300mm)[1]—
Vintage year2006[1]—

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Sources (1)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing