Comparison ledger
Applied Materials Enabler, Axcelis 200 ACU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | EnablerApplied Materials | 200 ACUAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | 2010 Vintage | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials Enabler | Axcelis NV GSD 200 |
| Cited variants | — | |
| Specifications | ||
| Manufacturer | Applied Materials[3] | Axcelis[5] |
| Model | Enabler[3] | 200 ACU[5] |
| Category | Etcher[3] | — |
| Wafer size | 12 inch[3] | 200mm[7] |
| Description | Dielectric etcher[1] | — |
| Process chambers | 4[1] | — |
| Version | 300 mm[1] | — |
| Configured wafer size | 300 mm[4] | — |
| Process | OX[4] | — |
| Software revision | B2.8_79[4] | — |
| FI software | FB4.70_12[4] | — |
| GEM software | 7.20_17[4] | — |
| Configuration | — | Parts Machine[5] |
| Tool type | — | Asher[5] |
| Serial number | — | AU6A356AH[7] |
| Computer system | — | M 200 PC, M 200[8] |
| Part number | — | SC 4572 A[8] |
| Volts | — | 208[8] |
| Amps | — | 30[8] |
| Equipment type | — | Asher[5] |
| Wafer configuration | — | 8 inch[6] |
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