Comparison ledger
Applied Materials DPS II CIP, Axcelis 200 ACU, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | DPS II CIPApplied Materials | 200 ACUAxcelis |
|---|---|---|
| OEM | Applied Materials | Axcelis |
| Category | Etch | Etch |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials DPS | Axcelis NV GSD 200 |
| Specifications | ||
| Configuration | 4x (D4) SILICON DPS II chamber, 12 Gas line (Standard Gas Line)[1] | Parts Machine[3] |
| Applicable | 2 Chiller[1] | — |
| Not applicable | Scrubber, Dry Pump[1] | — |
| OEM | Applied Materials[1] | — |
| Model | DPS II CIP[1] | 200 ACU[3] |
| Category | Etch[2] | — |
| Tool type | Etcher[2] | Asher[3] |
| Chamber | 4x (D4) SILICON DPS II chamber[1] | — |
| Gas line | 12 Gas line (Standard Gas Line)[1] | — |
| Chiller | 2 Chiller applicable[1] | — |
| Scrubber | Not applicable[1] | — |
| Dry pump | Not applicable[1] | — |
| Vintage | 2005[1] | — |
| Manufacturer | — | Axcelis[3] |
| Wafer size | — | 200mm[5] |
| Serial number | — | AU6A356AH[5] |
| Computer system | — | M 200 PC, M 200[6] |
| Part number | — | SC 4572 A[6] |
| Volts | — | 208[6] |
| Amps | — | 30[6] |
| Equipment type | — | Asher[3] |
| Wafer configuration | — | 8 inch[4] |
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