Waferpedia

Comparison ledger

9500 XR Ionversus160 XP Ion

Applied Materials 9500 XR Ion, Varian 160 XP Ion, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
9500 XR IonApplied Materials
OEMApplied MaterialsVarian
CategoryIon ImplantationIon Implantation
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials PI 9500Varian 160 XP Ion
Specifications
ConfigurationHigh Current[1]150mm High Current IMP[3]
GasBF3, AS, P[1]—
Wafer size8 inch[1]—
Current typeHigh current[2]—
Dopant gasesBF3, AS, P[1]—
Vintage year1996[1]—
FamilyPI 9500[2]—
OEM—Varian[4]
Model—160 XP Ion[4]
Category—Ion Implantation[3]
Tool type—ion implanter[3]

Plan your fab

Building a Ion Implantation process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]waferpedia.comwaferpedia.com
  4. [4]Equipment inventory listing