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0041-26723 Bonded AssemblyversusGemini

Applied Materials 0041-26723 Bonded Assembly, EV Group Gemini, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
GeminiEV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblyEV Group Gemini
Cited variants—
Specifications
Bond force (300 mm GEMINI)—up to 350 kN[2]
Bond force (200 mm GEMINI)—up to 100 kN[2]
Overpressure capability (300 mm GEMINI)—up to 2000 mbar[2]
Overpressure capability (200 mm GEMINI)—up to 3000 mbar[2]
Wafer sizes (200 mm GEMINI)—100 mm to 200 mm[2]
Wafer sizes (300 mm GEMINI)—200 mm to 300 mm[2]
Max number of bond chambers—up to 4 bond modules[2]
Pre-process modules (200 mm GEMINI)—up to 4 pre-process modules[2]
Pre-process modules (300 mm GEMINI)—2 to 6 pre-process modules[2]
Load ports (200 mm GEMINI)—EVG load ports or SMIF load ports[2]
Load ports (300 mm GEMINI)—FOUP load ports (optional adapter for 200 mm substrates)[2]
Bond alignment system—Field-proven SmartView® bond alignment system[2]
Wafer-to-wafer alignment accuracy (GEMINI FB)—sub 50 nm[1]
Max number of process modules (GEMINI FB)—6 + SmartView® NT[1]
Wafer diameter (GEMINI FB)—200, 300 mm[1]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]evgroup.comevgroup.com
  2. [2]evgroup.comevgroup.com