Waferpedia

Comparison ledger

0041-26723 Bonded Assemblyversus620 BA

Applied Materials 0041-26723 Bonded Assembly, EV Group 620 BA, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
620 BAEV Group
OEMApplied MaterialsEV Group
CategoryPackaging & BondingPackaging & Bonding
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0041-26723 Bonded AssemblyEV Group 620 BA
Specifications
Alignment method—Backside alignment, transparent alignment, IR alignment (optional)[1]
Backside alignment accuracy—±2 µm (3σ)[1]
Transparent alignment accuracy—±1 µm (3σ)[1]
Wafer sizes—2", 3", 100 mm, 150 mm[1]
Wafer thickness—0.1 - 10 mm[1]
Max stack height—10 mm[1]
Configuration—Desktop with optional system rack[1]
Vibration isolation—Passive[1]
Alignment stage—Manual precision micrometers, optional motorized, automated wedge compensation[1]
Microscopes—Fully motorized high-resolution bottom-side microscopes[1]
User interface—Windows-based[1]
Handling—Standard 3 cassette stations, optional up to 5 stations[1]
Automatic alignment—Optional[1]

Plan your fab

Building a Packaging & Bonding process? Get a complete equipment list.

Open the fab equipment planner →
Sources (1)Every fact above is drawn from these public sources
  1. [1]evgroup.comevgroup.com