Waferpedia

Comparison ledger

0020 18698 PartversusEagle 10 Trident

Applied Materials 0020 18698 Part, ASM Eagle 10 Trident, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0020 18698 PartApplied Materials
OEMApplied MaterialsASM
CategoryDepositionDeposition
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0020 18698 PartASM Eagle 10 Trident
Specifications
ConfigurationDial Cover, Side Local Match, Hdpcvd, Ul[1]—
Process—PECVD (Plasma-Enhanced Chemical Vapor Deposition)[2]
Wafer Size—6 inch[3]
Wafer Sizes—6 inch, 8 inch[2]
Vintage—2003[4]

Plan your fab

Building a Deposition process? Get a complete equipment list.

Open the fab equipment planner →
Sources (4)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]waferpedia.comwaferpedia.com
  3. [3]Equipment inventory listing
  4. [4]Equipment inventory listing