Comparison ledger
Applied Materials 0020 17485 Part, Temescal VES-2550, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0020 17485 PartApplied Materials | VES-2550Temescal |
|---|---|---|
| OEM | Applied Materials | Temescal |
| Category | Deposition | Deposition |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | Applied Materials 0020 17485 Part | Temescal VES-2550 |
| Specifications | ||
| Configuration | Strap, RF Out 2 Balanced Coil Match, Hdp[1] | — |
| Spare parts kit | — | VES-2550 O-ring Spares Kit; replacements for all O-rings used on Temescal VES-2550 systems; part no. 0515-5080-0[2] |
| Shields kit | — | VES-2550 Shields Kit includes main section shield, dome shield, and plenum shields; part no. 0715-3490-0[2] |
| Dome type | — | TP-8-25 Dome custom domes available upon request for VES-2550 systems[3] |
| Planet type | — | HSP-25 planets are listed for the VES-2550 system[3] |
| System type | — | E-Beam Evaporator[4] |
| Chamber size | — | 25.5-inch (648mm) diameter, low-profile chamber[5] |
| Designed for | — | Semiconductor production environments[5] |
| Electron beam sources accommodated | — | Up to three electron beam sources[5] |
| Pumping options | — | Cryopump standard; diffusion pump and turbopump also available[5] |
| Control system (optional) | — | Temescal PC/PLC Control System[5] |
| O-ring spares kit | — | VES-2550 O-ring Spares Kit, replacements for all O-rings used on Temescal VES-2550 systems, part no. 0515-5080-0[2] |
| Planet removal tool | — | Planet Removal Tool for use in VES-2550 systems with HSP fixtures, part no. 0217-4073-0[3] |
| Optional fixture types | — | TP-8, HSP, and variable-angle planetary fixtures available upon request for VES-2550 systems[3] |
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