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0010-22161 High EFF RF MatchversusSurePower QL 10513

Applied Materials 0010-22161 High EFF RF Match, MKS SurePower QL 10513, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsMKS
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
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FamilyApplied Materials 0010-22161 High EFF RF MatchMKS SurePower QL 10513
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Model Number—QL10513[3]
Part Number—QL10513A-11013[3]
ENI Rev—001[3]
Output—10500W[3]
Weight—129 pounds[3]
Input Voltage—200-208V 3P 60A[3]
Water In—2 g/min or 8 l/min minimum, 60 PSI maximum[3]
Configuration—This unit was pulled from a working system[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing