Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusRS 75

Applied Materials 0010-22161 High EFF RF Match, KLA RS 75, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchKLA RS 75
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Wafer size—6 inch, 8 inch[3]
Loader type—H type loader[3]
Flat finder—Included[3]
Voltage option 1—120 V[3]
Voltage option 2—115 V[3]
Frequency—50/60 Hz[3]
Vintage—2000[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]waferpedia.comwaferpedia.com