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0010-22161 High EFF RF Matchversus12 Vacuum

Applied Materials 0010-22161 High EFF RF Match, Edwards 12 Vacuum, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
12 VacuumEdwards
OEMApplied MaterialsEdwards
Category——
Wafer size——
Process node——
Introduced——
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Control system——
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FamilyApplied Materials 0010-22161 High EFF RF MatchEdwards 12 Vacuum
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]—
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Ultimate pressure—2 × 10⁻³ mbar[3]
Pumping speed (50 Hz)—12 m³/h[3]
Inlet Flange—NW25[3]
Noise level (50 Hz)—48 dB(A)[3]
Weight—26.30 kg (58.00 lb)[3]
Dimensions (L × H × W)—0.490 m × 0.229 m × 0.158 m[3]
Power total rated @50 Hz—370 W[3]
Power total rated @60 Hz—440 W[3]
Ultimate pressure with gas ballast—3 Pa[3]
Inlet/Outlet connection—DN 25 ISO-KF (NW25) / DN 25 ISO-KF (NW25)[3]
Water vapour throughput—8.000 × 10⁻⁵ kg/s[3]
Max water vapour pressure—3200 Pa[3]
Nominal rotational speed @50 Hz—25.00 Hz[3]
Nominal rotational speed @60 Hz—30.00 Hz[3]
Displacement @50 Hz max—3.944 × 10⁻³ m³/s[3]
Displacement @60 Hz max—4.722 × 10⁻³ m³/s[3]
Lubricant capacity—39.67 to 61.02 in³[3]
Max inlet pressure (continuous)—50000 Pa[3]
Max outlet pressure (continuous)—1.2 × 10⁵ Pa[3]
Ambient temperature range (operation)—12 °C to 40 °C[3]
Ambient temperature range (storage)—-30 °C to 70 °C[3]
Motor certification—UL (61010-1 3rd Edition), CSA (C22.2 No.61010-1-12)[3]
Max altitude—2000 m[3]
Is pump wet or dry?—Wet (oil-sealed)[3]
Material rotor and stator—High grade cast iron[3]
Voltage/frequency—Single phase, 115/230 V, 50/60 Hz, factory set to 115 V for USA[3]
Sources (3)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]ajvs.comajvs.com