Waferpedia

Comparison ledger

0010-22161 High EFF RF MatchversusIPC 2000 / 3000

Applied Materials 0010-22161 High EFF RF Match, Branson IPC 2000 / 3000, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsBranson
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-22161 High EFF RF MatchBranson IPC 2000 / 3000
Specifications
MakeApplied Materials[1]—
Model0010-22161[1]IPC 2000 / 3000[3]
DescriptionHTESC PH 1 REV A[2]—
ConditionUsed[2]—
Stock NumberBM6628[2]—
Configuration—Refurbished[3]
Manufacturer—Branson[3]
Equipment family—Branson/IPC 2000, 3000, and 4000 Series manual plasma systems[4]
Loading—Manual load / unload[4]
Process type—Plasma ashing, descum, dry cleaning, surface treatment, or plasma etching depending on configuration[4]
Wafer / sample size—Small samples up to 8 inch wafers depending on model and chamber configuration[4]
Chamber type—Quartz chamber for ashing / descum or metal chamber for etching depending on model[4]
RF power—Configuration dependent[4]
Gas lines—Configuration dependent[4]
Wafer quantity per run—Configuration dependent[4]
Operation—Automatic, semi-automatic, or manual depending on controller configuration[4]
PC controller upgrade option—Available for selected working systems, subject to evaluation[4]
Model family—IPC 2000 / 3000 family[5]
Sources (5)Every fact above is drawn from these public sources
  1. [1]Equipment inventory listing
  2. [2]tarasemi.comtarasemi.com
  3. [3]inventory listing
  4. [4]semistarcorp.comsemistarcorp.com
  5. [5]waferpedia.comwaferpedia.com