Comparison ledger
Applied Materials 0010-21246 Part, YES 253B-60-63-2, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-21246 PartApplied Materials | 253B-60-63-2YES |
|---|---|---|
| OEM | Applied Materials | YES |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | YES 253B-60-63-2 |
| Cited variants | — |
|
| Specifications | ||
| Model | — | 253B-60-63-2[1] |
| Product name | — | MKS Type 253B Exhaust Throttle Valve[1] |
| Valve type | — | butterfly valve[1] |
| Function | — | regulates the removal of gas from a vacuum chamber[1] |
| Compatible controllers | — | Type 651, 652, 152G, or 252 (revision D or later) controllers[1] |
| Actuator feature | — | nonlinear actuator between the butterfly shaft and the motor drive shaft[1] |
| Transfer characteristic | — | linear valve transfer characteristic[1] |
| Mounting flange types | — | ASA, NW Style ISO, KF Style ISO, CF, JIS[1] |
| Connector | — | 15-pin Type D connector[1] |
| Connector cable length | — | 6 inch pigtail cable[1] |
| Valve body heater power input | — | ±15 VDC, 1 Amp, 30 Watts nominal, user-supplied[1] |
| Valve body heater operating temperature | — | 80° to 90° C for 20° to 40° C ambient[1] |
| External leakage at shaft seal | — | 1 x 10-7 scc/sec He[1] |
| Materials exposed to process | — | 316L SS, Viton[1] |
| Driver/gear assembly width | — | 3.75 inch square (95 mm)[1] |
| Differential pressure across valve | — | 1 atm. (15 psig) max.[1] |