Waferpedia

Comparison ledger

0010-18024 Pyrometer Assemblyversus1550

Applied Materials 0010-18024 Pyrometer Assembly, LEO 1550, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
1550LEO
OEMApplied MaterialsLEO
CategoryMetrology & InspectionMetrology & Inspection
Wafer size—4"
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyLEO 1550
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]—
Section—FIB / SEM / EDX / ProSEM[2]
Sample holders—4 Inch Wafer, 6 Inch Wafer, 6 Inch Mask[2]

Plan your fab

Building a Metrology & Inspection process? Get a complete equipment list.

Open the fab equipment planner →
Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]epfl.chepfl.ch