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0010-18024 Pyrometer AssemblyversusCS 4800 CD-SEM

Applied Materials 0010-18024 Pyrometer Assembly, Hitachi CS 4800 CD-SEM, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
OEMApplied MaterialsHitachi
CategoryMetrology & InspectionMetrology & Inspection
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-18024 Pyrometer AssemblyHitachi CS 4800 CD-SEM
Specifications
ConfigurationCapable of working on Applied Materials Radiance[1]Dual cassette[2]
Voltage—208V, 60Hz[2]
Nominal Voltage / Frequency—208V, 60Hz[2]
Wafer Size—3, 4, 8 inch[2]
Frequency—60 Hz[2]
Wafer Handling—Dual cassette[2]
Recirculating Chiller—Haskris R050-HHT-BHK(R2)-SEMI-50/60HZ[2]
Vacuum Pump—Edwards iXL120E[2]
System Terminal—NEC FC98-NX FC-E21G[2]
Control Laptop—Dell Latitude Control Laptop (2017 vintage)[2]

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Sources (2)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]inventory listing