Waferpedia

Comparison ledger

0010-16392 ESC AssemblyversusParadigme

Applied Materials 0010-16392 ESC Assembly, Mattson Paradigme, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-16392 ESC AssemblyApplied Materials
ParadigmeMattson
OEMApplied MaterialsMattson
CategoryEtchEtch
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-16392 ESC AssemblyMattson Paradigme
Cited variants—
  • Paradigme XP Light[1]
Specifications
OEMApplied Materials[2]—
Model0010-16392[2]Paradigme[4]
TypeESC Assembly[2]—
Wafer Size300 mm[3]—
Electrode ConfigurationDual[3]—
Manufacturer—Mattson[4]
Category—Etch[5]
Wafer size—300 mm[1]
Process node—20-nanometer technology node and below[6]
Chamber design—two-wafer chamber design[6]
Plasma source—proprietary plasma source[6]

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Sources (6)Every fact above is drawn from these public sources
  1. [1]waferpedia.comwaferpedia.com
  2. [2]Equipment inventory listing
  3. [3]spwindustrial.comspwindustrial.com
  4. [4]Equipment inventory listing
  5. [5]waferpedia.comwaferpedia.com
  6. [6]semiconductoronline.comsemiconductoronline.com