Waferpedia

Comparison ledger

0010-03485 Magnet Assyversus3640 Wafer Disk Analyzer

Applied Materials 0010-03485 Magnet Assy, Rigaku 3640 Wafer Disk Analyzer, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03485 Magnet AssyApplied Materials
OEMApplied MaterialsRigaku
Category——
Wafer size——
Process node——
Introduced——
Production run—1977–
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
FamilyApplied Materials 0010-03485 Magnet AssyRigaku 3640 Wafer Disk Analyzer
Specifications
ConfigurationWP AL 300mm PVD[1]—
OEMApplied Materials[1]—
Model0010-03485[1]3640 Wafer / Disk Analyzer[5]
DescriptionMAGNET ASSY, WP AL 300MM PVD[2]—
ProcessPVD[3]—
Wafer size300mm[4]8 inch[5]
VersionSpares[4]—
Part Number0010-03485[1]—
ManufacturerApplied Materials[1]—
Process TypePVD (Physical Vapor Deposition)[1]—
Application (Material)Aluminum (AL)[1]—
Wafer Diameter (associated)300 mm[1]—
Make—Rigaku[5]
Sample size—8" max.[6]
Sample stage—XYθ driving system, spin mechanism (for center measurement)[6]
Elements for simultaneous analysis—16 elements max.[6]
Goniometer—Fixed type goniometer for each element; scanning type goniometer for Ti through U[6]
Collimator—2 kinds for automatic exchange; selectable from 5, 10, 15 and 20 mm dia.[6]
Automatic vacuum degree controller—13 Pa ± 1 Pa (APC: automatic pressure controller)[6]
Temperature stabilizer—Available[6]
X-ray tube—Rh target, 3 kW[6]
X-ray generator—Maximum output: 3 kVA[6]
Heat exchanger—Distilled water recirculation system (with ion exchange resin)[6]
Vacuum pump—Dry pump (QDP-80)[6]
Cassette-to-cassette—Optional[6]
Orientation flat/notch—Adjustable[6]
Software—Multiwindow/multitask FP method for multilayer thin film wafer measuring direction setting program[6]
Mapping—Optional[6]
Personal computer—DOS/V compatible[6]
Operating system—OS/2 Warp[6]
Display/peripherals—15" color CRT, ink jet printer[6]
Sources (6)Every fact above is drawn from these public sources
  1. [1]inventory listing
  2. [2]semistarcorp.comsemistarcorp.com
  3. [3]layla-ec.comlayla-ec.com
  4. [4]fabsurplus.comfabsurplus.com
  5. [5]Equipment inventory listing
  6. [6]ptwsingapore.comptwsingapore.com