Comparison ledger
Applied Materials 0010-03254 E Chuck, Semitool SST 421 Spray Solvent, side by side. Every value shown is drawn from the cited encyclopedia entries.
| Attribute | 0010-03254 E ChuckApplied Materials | SST 421 Spray SolventSemitool |
|---|---|---|
| OEM | Applied Materials | Semitool |
| Category | — | — |
| Wafer size | — | — |
| Process node | — | — |
| Introduced | — | — |
| Production run | — | — |
| Lifecycle | — | — |
| Lifecycle milestones | — | — |
| Control system | — | — |
| Generation | — | — |
| Family | — | Semitool SST 421 Spray Solvent |
| Specifications | ||
| Voltage | — | 400 Vac / 35 A[1] |
| Model | — | SST-421[2] |
| Manufacturer | — | Semitool[3] |
| Description | — | Spray Solvent Tool[4] |
| Tool type | — | Automated Spray Solvent Tool (SST)[2] |
| Process role | — | Batch Solvent Processor for Wafer Cleaning[2] |
| Wafer size | — | 8"/200mm[2] |
| Number of tanks | — | 4[6] |
| Number of heated tanks | — | 2[6] |
| Single chamber | — | Yes[2] |
| Rotor included | — | 1 rotor included[2] |