Waferpedia

Comparison ledger

0010-03254 E ChuckversusSFS 6200

Applied Materials 0010-03254 E Chuck, KLA SFS 6200, side by side. Every value shown is drawn from the cited encyclopedia entries.

Side-by-side comparison of selected equipment models
Attribute
0010-03254 E ChuckApplied Materials
OEMApplied MaterialsKLA
Category——
Wafer size——
Process node——
Introduced——
Production run——
Lifecycle——
Lifecycle milestones——
Control system——
Generation——
Family—KLA SFS 6200
Specifications
Equipment type—Particle counter[1]
Wafer size—8 inch[2]
Series—KLA Tencor SurfScan series[3]
Manufacturer—KLA Tencor[4]
Sources (4)Every fact above is drawn from these public sources
  1. [1]getspares.comgetspares.com
  2. [2]Equipment inventory listing
  3. [3]lalu-optics.comlalu-optics.com
  4. [4]semistarcorp.comsemistarcorp.com